Spectroscopic Ellipsometry: Principles and Applications

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File Name: Fujiwara H. - Spectroscopic Ellipsometry. Principles and Applications(2007)(388).pdf
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Uploaded: 08/09/2017

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Author: Fujiwara H.
Year: 2007
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Pages: 388
PagesInFile: 388
Language: English
Topic: Physics > Optics
Library: mexmat
Library issue: 40

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DPI: 0
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Searchable: 1

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ISBN: 4621072536
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CRC32: 5C4846FB
SHA1: JPW3YRHBICMDJUOPET34TPDUOU3TJVMV
SHA256: 424111E9FE795CD8DEE4A9F9D5F71C4282DAE010A69EC4C5C6D70FAB6B85C79A
MD5: 7B371CA9126397A9C8889E0AF7AE6C3C

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Description:

Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

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