Spectroscopic Ellipsometry: Principles and Applications

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Information:

Volume info:
Series:
Periodical:
Author: Hiroyuki Fujiwara
Year: 2007
Edition: 1
Publisher: Wiley
City:
Pages: 388
PagesInFile: 388
Language: English
Topic: Mathematics > Applied Mathematicsematics
Library:
Library issue: до 2011-01

Commentary:
DPI: 0
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Cleaned:
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Paginated:
Scanned:
Bookmarked: 1
Searchable: 1

Identifiers:

ISBN: 0470016086,9780470016084
ISSN:
ASIN:
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Googlebook id:
Openlibrary id: OL7594524M

CRC32: 255897B6
SHA1: BBR4SUNRPRMXHIFL6BADNTJVX3NERBFM
SHA256: 3E372BD1415FF9A2783A49BE2B8040A7FB2416A1CC0BE166CFDD2C093452A0DD
MD5: 8E08FF8ABD378A9A266C2E46D85158E8

TOC:

Cover......Page 1
Spectroscopic Ellipsometry......Page 4
ISBN-13: 9780470016084......Page 5
Contents......Page 8
Foreword......Page 14
Preface......Page 16
Acknowledgments......Page 18
1 Introduction to Spectroscopic Ellipsometry......Page 20
2 Principles of Optics......Page 32
3 Polarization of Light......Page 68
4 Principles of Spectroscopic Ellipsometry......Page 100
5 Data Analysis......Page 166
6 Ellipsometry of Anisotropic Materials......Page 228
7 Data Analysis Examples......Page 268
8 Real-Time Monitoring by Spectroscopic Ellipsometry......Page 330
Appendices......Page 12
Appendix 1 Trigonometric Functions......Page 364
Appendix 2 Definitions of Optical Constants......Page 366
Appendix 3 Maxwell’s Equations for Conductors......Page 368
Appendix 4 Jones–Mueller Matrix Conversion......Page 372
Appendix 5 Kramers–Kronig Relations......Page 376
Index......Page 380

Description:

Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

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