Spectroscopic ellipsometry : practical application to thin film characterization

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File Name: Spectroscopic Ellipsometry.pdf
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Volume info:
Series: Materials characterization and analysis collection
Periodical:
Author: Hilfiker, James N.,Tompkins, Harland G
Year: 2016
Edition:
Publisher: Momentum Press
City:
Pages: 178
PagesInFile: 194
Language: English
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DPI: 0
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Cleaned:
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Paginated:
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Searchable: 1

Identifiers:

ISBN: 1606507273,9781606507278,9781606507285
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Openlibrary id:

CRC32: ECD1C690
SHA1: B5A6EE2OQ5C2C7R6XIDS2ENZQYWNCHWK
SHA256: 04288579EE46A9B06956C5C7379AF58D2C3429A64EDFB8D465F86156C52E6746
MD5: 9af65149cf596a40bc252d08d06e4183

TOC:

Content: Perspective, previous works, and purpose of this volume --
Basic physical phenomena --
Spectroscopic ellipsometry components and instrumentation --
General data features --
Representing optical functions --
Optical data analysis --
Transparent thin films --
Roughness --
Very thin films --
Thin films with absorbing spectral regions --
Metallic films --
Multilayer thin film stacks.

Description:

Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thickness from subnanometer to several microns. Spectroscopic measurements have greatly expanded the capabilities of this technique and introduced its use into all areas where thin films are found: semiconductor devices, flat panel and mobile displays, optical Read more...

Abstract: Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thickness from subnanometer to several microns. Spectroscopic measurements have greatly expanded the capabilities of this technique and introduced its use into all areas where thin films are found: semiconductor devices, flat panel and mobile displays, optical coating stacks, biological and medical coatings, protective layers, and more. While several scholarly books exist on the topic, this book provides a good introduction to the basic theory of the technique and its common applications. It follows in the footsteps of two previous books written by one of the authors with important updates to emphasize modern instrumentation and applications. The target audience is not the ellipsometry scholar, but process engineers and students of materials science who are experts in their own fields and wish to use ellipsometry to measure thin film properties without becoming an expert in ellipsometry itself

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